Customization: | Available |
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Output Type: | Single |
Warranty: | 1 Year |
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Power (W):6
Max Output Voltage (KV):2
Features and Benefits:
Reliable clamp/release state detection by wafer sensor
Fast response of amplifier architecture design
("no relay polarity inversion" design for high reliability and long life.)
"Dual channel independent control (option)" and
"center tap voltage setting (option)" for various chuck/release operations
Equipped with LAN, USB, RS-232C digital interface
Built-in low-pass RF filter (13.56 MHz)
ECA series are high voltage amplifiers for electrostatic chucks (E-Chuck, ESC). In addition to polarity switching and forced grounding, this series also offers a wafer monitoring system for wafer inspection needs. Additionally, with a wide voltage range, the series supports Coulomb and Johnsen-Rahbek electrostatic chucks.
Typical Application:
Electrostatically driven material handling
Semiconductor Wafer Processing
Non-mechanical transfer of flat sheets or other processed materials sensitive to mechanical handling
Features and Benefits:
Reliable clamp/release state detection by wafer sensor
Fast response of amplifier architecture design ("no relay polarity inversion" design for high reliability and long life.)
"Dual channel independent control (option)" and "center tap voltage setting (option)" for various chuck/release operations
Equipped with LAN, USB, RS-232C digital interface
Built-in low-pass RF filter (13.56 MHz)
Output voltage setting characteristics:
Waveform example:
Optional CT
Center tap bias
0 to ±[maximum rate voltage - voltage set point]
Optional ET
Ethernet CAT interface
[coming soon]
Optional DS
Dual channel independent control
Optional AC
AC 100V to 240V 1 φ input
Optional L7
Output high voltage cable 7m x 3
(2 when CT or DS is selected)
Wisman advances medical care, industrial processes, quality control, scientific research, security and telecommunications by providing innovative high voltage power supplies including micro-modules high voltage power supply, modules high voltage power supply, X-ray generator, rack mount voltage power supply, special customized high voltage power supply, high voltage accessories, etc. that enable equipment manufacturers to improve their systems' performance, reliability, cost and bottom line. Power range from 100mW to 200kW, voltage range from 60V to 500kV. You can purchase multiple varieties and specifications in one-stop from us. We have a high-voltage power supply research and development team, high-voltage power supply development software and software for testing high voltage insulation technology and zero current resonance technology, making our high voltage power supplies maintain high stability, low ripple, excellent in EMC. Our products are compact, highly efficient with a long operating life.
Wisman high voltage power supplies are competitively priced and a great idea for OEM customers.
CERTIFICATES |
EXHIBITION SHOW |
COMPANY INTRODUCTION |
Wisman High Voltage Power Supply Corporation is the world's leading high voltage power supply,High voltage Micro-modules,High voltage Modules,X-ray Generator,High voltage Rack mount,X-Ray Sources,High Voltage Amplifiers, manufacturer serving the medical, analytical, industrial, commercial, telecommunication and scientific communities. wisman high voltage power supply standard and Custom Application high voltage power supplies, High voltage Micro-modules,High voltage Modules,X-ray Generator,High voltage Rack mount,X-Ray Sources,High Voltage Amplifiers, Their power range from 0.1 watts to over 200 kilowatts and voltages from 62 volts to over 2500kV.
Information on wisman and their wide range of high voltage products is available by visiting their website.
One but you have become Wisman's customer, you will enjoy to us from the product application project to the technical support omni-directional service, we welcome you to give the precious comment and the suggestion for us.
Enterprise prospect: Becomes command respect and most has the innovation ability global leading enterprise.
The enterprise mission: Creates the opportunity for the customer creation value for the staff to create the benefit for the shareholder to undertake responsibility for the society
The spirit of enterprise: Professional, the good faith, the team, innovate
The enterprise values: The good faith fulfills responsibility fair fair transformation innovation unity of knowledge and action whole supreme
The management strategy: The development best product, provides the best service, foundation best brand.
COOPERATIVE LOGISTICS |
FAQ |
Q. Are you a manufacturer or a trading company? |
Q. How is your after-sales service system? |
Q. How long is your delivery time? |
Q. Our country's power supply and plug are different. How do you solve it? |
Q. How to pay? |
Q. How is the package of goods? Delivery methods? |
A. 1. Carton box package.
2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service