ECD Series E-chuck Specific High Voltage Power Supply for Semi Applications(0-±3kV,19.5W)

• Customization: Available
• Output Type: Single
• Warranty: 1 Year
• Model NO.: ECD
• Output Power: 19.5W
• Input Voltage: 24VDC
• Connection Mode: Series Switching Power Supply
• Starting Mode: Self-excited Switching Power Supply
• Voltage Regulating Mode: Width Modulation Type
• Power Supplying System: Terminal Power Distribution Equipment
• Energy Transmission: Two-way Transmission
• Certification: CE, RoHS, ISO
• Brand: Wisman
• Output: 0-±3kV
• Noise: Less than 50mVrms
• Cooling: Convection Cooling
• Operating Temperature: 0 Centigrade-+35 Centigrade
• Storage Temperature: -40 Centigrade~+85 Centigrade
• Dimension: 88.1mm*431.8mm*531.9mm
• Weight: 7kg
• Transport Package: Carton
• Specification: 88.1mm*431.8mm*531.9mm
• Trademark: Wisman
• Origin: China
• Production Capacity: 50000 Units

Product Description

ECD Series E-chuck Specific High Voltage Power Supply for Semi Applications(0-±3kV,19.5W)

 

Improves efficiency and throughput: three times 

that of ordinary power supplies; Reducing back-side 

gas errors, increasing throughput and eliminating 

wafer sticking/bursting problems; 

Control of parameters such as overcurrent, presence 

of wafer and wafer clamping thresholds, clamping 

voltage, offset voltage and internal or external amplitude/offset control;

Versatility in amplitude/offset and output control during tuning;

Control of outputs using rear panel I/O, serial computer commands, 

or front panel controls;

Configuration of custom clamp and de-clamp sequences and waveforms.

Lockable front panel control interface.

Support for Coulombic and Johnsen-Rahbek ESC technologies.

Upload and store electrostatic chuck profiles to the device 

and store them internally through a user-friendly software interface.

Wafer detection including no wafer, 

present wafer or wafer clamping status.

 

 

PRF SERIES INTRODUCTION

Wisman's ECD series of software-driven electrostatic chuck power supplies offer a range of features to meet a wide variety of demanding applications. The instrument incorporates Wisman amplifier technology, which has been shown to increase efficiency and throughput by as much as three times that of other power supplies. Reduce backside gas errors, increase throughput and eliminate wafer sticking/popping issues; control parameters such as overcurrent, wafer presence and wafer clamp thresholds, clamp voltage, offset voltage, and internal or external amplitude/offset control; versatility in amplitude/offset and output control during adjustment; control output using rear panel I/O, serial computer commands, or front panel controls; configure custom clamping and declamping sequences and waveforms. The versatile and trusted performance of Wisman's ECD allows for use in a wide range of unique tools and processes without adding new costs for each unique tool or process in the facility.

SPECIFICATION

CERTIFICATES

EXHIBITION SHOW

COMPANY INTRODUCTION

Wisman High Voltage Power Supply Corporation is the world's leading high voltage power supply,High voltage Micro-modules,High voltage Modules,X-ray Generator,High voltage Rack mount,X-Ray Sources,High Voltage Amplifiers, manufacturer serving the medical, analytical, industrial, commercial, telecommunication and scientific communities. wisman high voltage power supply standard and Custom Application high voltage power supplies, High voltage Micro-modules,High voltage Modules,X-ray Generator,High voltage Rack mount,X-Ray Sources,High Voltage Amplifiers, Their power range from 0.1 watts to over 200 kilowatts and voltages from 62 volts to over 2500kV.

Information on wisman and their wide range of high voltage products is available by visiting their website. 

One but you have become Wisman's customer, you will enjoy to us from the product application project to the technical support omni-directional service, we welcome you to give the precious comment and the suggestion for us. 

Enterprise prospect: Becomes command respect and most has the innovation ability global leading enterprise.

The enterprise mission: Creates the opportunity for the customer creation value for the staff to create the benefit for the shareholder to undertake responsibility for the society

The spirit of enterprise: Professional, the good faith, the team, innovate

The enterprise values: The good faith fulfills responsibility fair fair transformation innovation unity of knowledge and action whole supreme

The management strategy: The development best product, provides the best service, foundation best brand.

COOPERATIVE LOGISTICS

FAQ

 

Q. Are you a manufacturer or a trading company?

A. We are factory covering an area of 8000 square meters, the number of professional engineers in R& D team is above 50. We offer the broadest and most advanced range of standard and platform products in the industry, we develop, produce and support the optimum solution for each system and market segment.

Q. How is your after-sales service system?

A. The warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues and provide 24 hours online technical support.

Q. How long is your delivery time?

A. 1. For standard unit, the delivery time is about 4-6weeks
2. For OEM goods, pls contact with Wisman's sales.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A. Standard payment terms is T / T, for other payment terms, pls contact Wisman's Sales.

Q. How is the package of goods? Delivery methods?

A. 1. Carton box package.
2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service