Customization: | Available |
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Output Type: | Single |
Warranty: | 1 Year |
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1,Improves efficiency and wafer throughput three times that of ordinary power supplies;
2,Reduce backside gas errors, improve throughput and eliminate wafer stick/burst problems;
3,Control parameters such as overcurrent, presence of wafer and wafer clamp thresholds,
clamp voltage, offset voltage, and internal or external amplitude/offset controls;
4,The versatility of amplitude/offset and output control during adjustment;
5,Control output using rear panel I/O, serial computer commands, or front panel controls;
6,Configuration of custom clamp and clamp removal sequence and waveform;
7,Lockable front panel control interface;
8,Supports Coulombic and Johnsen-Rahbek ESC technologies
9,This section describes how to upload the configuration file of an electrostatic chuck
to the device and store it in the device using a user-friendly software interface;
10,Wafer detection includes wafer free, wafer presence, or wafer clamped state
EC SERIES INTRODUCTION |
Wisman's EC series of software-driven electrostatic sucker power supplies provide a range of features to meet a wide range of demanding applications. The instrument uses Wisman amplifier technology, which has been shown to increase efficiency and throughput by up to three times that of other power sources. Reduce backside gas errors, improve throughput and eliminate wafer stick/burst problems; Control parameters such as overcurrent, presence of wafer and wafer clamp thresholds, clamp voltage, offset voltage, and internal or external amplitude/offset controls; The versatility of amplitude/offset and output control during adjustment; Control output using rear panel I/O, serial computer commands, or front panel controls; Configures custom clamp and clamp removal sequences and waveforms. The versatile and trusted performance of Wisman's EC allows for use in multiple unique tools and processes without adding new costs to each unique tool or process in the facility.
SPECIFICATION |
CERTIFICATES |
EXHIBITION SHOW |
COMPANY INTRODUCTION |
Wisman High Voltage Power Supply Corporation is the world's leading high voltage power supply,High voltage Micro-modules,High voltage Modules,X-ray Generator,High voltage Rack mount,X-Ray Sources,High Voltage Amplifiers, manufacturer serving the medical, analytical, industrial, commercial, telecommunication and scientific communities. wisman high voltage power supply standard and Custom Application high voltage power supplies, High voltage Micro-modules,High voltage Modules,X-ray Generator,High voltage Rack mount,X-Ray Sources,High Voltage Amplifiers, Their power range from 0.1 watts to over 200 kilowatts and voltages from 62 volts to over 2500kV.
Information on wisman and their wide range of high voltage products is available by visiting their website.
One but you have become Wisman's customer, you will enjoy to us from the product application project to the technical support omni-directional service, we welcome you to give the precious comment and the suggestion for us.
Enterprise prospect: Becomes command respect and most has the innovation ability global leading enterprise.
The enterprise mission: Creates the opportunity for the customer creation value for the staff to create the benefit for the shareholder to undertake responsibility for the society
The spirit of enterprise: Professional, the good faith, the team, innovate
The enterprise values: The good faith fulfills responsibility fair fair transformation innovation unity of knowledge and action whole supreme
The management strategy: The development best product, provides the best service, foundation best brand.
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